Micro-Raman spectroscopic analysis of tetrahedral amorphous carbon films deposited under varying conditions

Authors :: Liu, E.
Shi, X.
Tay, B.K.
Cheah, L.K.
Tan, H.S.
Shi, J.R.
Sun, Z.
Source :: Journal of Applied Physics. Dec 1, 1999, Vol. 86 Issue 11, p6078, 6 p.
Publication Year :: 1999
Abstract: A new study uses micro-Raman spectroscopic analysis to investigate the structure of tetrahedral amorphous carbon films deposited under a variety of conditions.

Subjects :: Amorphous semiconductors -- Research
Carbon -- Research
Thin films -- Research
Physics

Tools