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Japanese companies design multifunction minifab tools [*]
- Source :
- Solid State Technology. June, 2001, Vol. 44 Issue 6, p83
- Publication Year :
- 2001
-
Abstract
- OVERVIEW Toshiba, TEL, and a new Japanese national project aim to come up with a better way to quickly turn out small volumes of complex systems chips at low cost, […]
- Subjects :
- Semiconductor industry
Semiconductor production equipment
Semiconductor device
Semiconductor production equipment industry
Toshiba Corp. -- Product information
Tokyo Electron Ltd. -- Product information
Semiconductor industry -- Product information
Semiconductor production equipment industry -- Product information
Semiconductor production equipment -- Product information
Subjects
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 44
- Issue :
- 6
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.75647407