Back to Search Start Over

Low energy ion assisted control of interfacial structure: ion fluence effects

Authors :
Zhou, X.W.
Wadley, H.N.G.
Source :
Journal of Applied Physics. Nov 15, 2000, Vol. 88 Issue 10, p5737, 7 p.
Publication Year :
2000

Abstract

Research describing the effects of ion fluence on interfacial intermixing and surface smoothing of multilayered thin films is presented. In particular a nickel-copper-nickel multilayer system is investigated.

Subjects

Subjects :
Physics -- Research
Semiconductors -- Impurity distribution
Thin films, Multilayered -- Research
Physics

Details

ISSN :
00218979
Volume :
88
Issue :
10
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.76955191

Tools

Authors Abstract Subjects Details