Analysis of SAW properties of epitaxial ZnO films grown on R-Al[subscript 2]O[subscript 3] substrates

Authors :: Emanetoglu, Nuri William
Patounakis, George
Liang, Shaohua
Gorla, Chandrasekhar R.
Wittstruck, Richard
Lu, Yicheng
Source :: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. Sept, 2001, Vol. 48 Issue 5, p1389, 6 p.
Publication Year :: 2001
Abstract: Piezoelectric properties of epitaxial ZnO thin films grown on R-plane sapphire substrates using metal organic chemical vapor deposition (MOCVD) are examined. High quality epitaxial films with films with atomically sharp film-substrate interfaces were obtained.

Subjects :: Acoustic surface wave devices -- Research
Thin films -- Electric properties
Piezoelectric materials -- Research
Zinc oxide -- Research
Business
Electronics
Electronics and electrical industries

ISSN :: 08853010
Volume :: 48
Issue :: 5
Database :: Gale General OneFile
Journal :: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publication Type :: Academic Journal
Accession number :: edsgcl.79236854

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