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Study of the effect of grain boundary migration on hillock formation in A1 thin films

Authors :
Kim, Deok-Kee
Nix, William D.
Vinci, Richard P.
Deal, Michael D.
Plummer, James D.
Source :
Journal of Applied Physics. July 15, 2001, Vol. 90 Issue 2, p781, 8 p.
Publication Year :
2001

Abstract

Grain boundary migration effects on hillock formation in AI thin films is examined.

Details

ISSN :
00218979
Volume :
90
Issue :
2
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.79280359