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STRAIN POSITIONS MICROMACHINED STRUCTURES
- Source :
- Inside R&D. May 18, 2001, 8
- Publication Year :
- 2001
-
Abstract
- Virtually anybody and most tools are all thumbs when trying to precisely place a tiny micromachined part into a MEMS (micro electromechanical system) or MOEMS (optical MEMS) device. Researchers in [...]
Details
- ISSN :
- 0300757X
- Database :
- Gale General OneFile
- Journal :
- Inside R&D
- Publication Type :
- News
- Accession number :
- edsgcl.80060379