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High-precision system for automatic null ellipsometric measurement
- Source :
- Applied Optics. August 1, 2002, Vol. 41 Issue 22, p4536, 5 p.
- Publication Year :
- 2002
-
Abstract
- A system for automatic null ellipsometric measurement, which uses a new kind of achromatic rhomb-type [lambda]/4 retarder, is designed and constructed. By use of terbium glass as the modulator's material, a magneto-optical modulator and its driving circuit are constructed. The polarized light is modulated by dc and ac. Combined with an ultra-low noise frequency-selective amplifier and a lock-in amplifier, the null time of the mechanical and photoelectric automatic null system can be less than 15 s. After the error of the mechanical parts is excluded, the repeatability standard deviation [S.sub.4] of nulling angles can be less than 0.00025 deg.
Details
- ISSN :
- 1559128X
- Volume :
- 41
- Issue :
- 22
- Database :
- Gale General OneFile
- Journal :
- Applied Optics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.90396118