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Micromachined gas flow regulator for ion propulsion systems

Authors :
Bruschi, P.
Diligenti, A.
Piotto, M.
Source :
IEEE Transactions on Aerospace and Electronic Systems. July, 2002, Vol. 38 Issue 3, p982, 7 p.
Publication Year :
2002

Abstract

A gas flow regulator for ion propulsion systems on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a borosilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions of the device is described. The gas mass flow dependence on both the inlet pressure and the absolute temperature is measured and discussed.

Subjects

Subjects :
Gas flow -- Equipment and supplies
Gas flow -- Measurement
Artificial satellites -- Equipment and supplies
Flow meters -- Design and construction
Aerospace and defense industries
Business
Computers
Electronics
Electronics and electrical industries

Details

ISSN :
00189251
Volume :
38
Issue :
3
Database :
Gale General OneFile
Journal :
IEEE Transactions on Aerospace and Electronic Systems
Publication Type :
Academic Journal
Accession number :
edsgcl.92846295

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Authors Abstract Subjects Details