Carbon dioxide as working gas for laboratory plasmas

Measurements with a RF probe, retarding potential analyzer and mass spectrometer in a laboratory plasma tank were performed using the gases CO2, N2, A and He in order to compare their properties as working gases for laboratory plasma production. The overall result of that CO2 leads to higher plasma densities at lower neutral-gas pressures as well as to a larger Maxwellian component of the electron population, while the electron temperature is lower than that when N2, A and He are used.