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Influence of Natural Convection and Thermal Radiation Multi-Component Transport in MOCVD Reactors

Authors :
Lowry, S
Krishnan, A
Clark, I
Source :
NASA Microgravity Materials Science Conference.
Publication Year :
1999
Publisher :
United States: NASA Center for Aerospace Information (CASI), 1999.

Abstract

The influence of Grashof and Reynolds number in Metal Organic Chemical Vapor (MOCVD) reactors is being investigated under a combined empirical/numerical study. As part of that research, the deposition of Indium Phosphide in an MOCVD reactor is modeled using the computational code CFD-ACE. The model includes the effects of convection, conduction, and radiation as well as multi-component diffusion and multi-step surface/gas phase chemistry. The results of the prediction are compared with experimental data for a commercial reactor and analyzed with respect to the model accuracy.

Subjects

Subjects :
Fluid Mechanics And Heat Transfer

Details

Language :
English
Database :
NASA Technical Reports
Journal :
NASA Microgravity Materials Science Conference
Notes :
NAS8-40846
Publication Type :
Report
Accession number :
edsnas.19990040308
Document Type :
Report