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Influence of Natural Convection and Thermal Radiation Multi-Component Transport in MOCVD Reactors
- Source :
- NASA Microgravity Materials Science Conference.
- Publication Year :
- 1999
- Publisher :
- United States: NASA Center for Aerospace Information (CASI), 1999.
-
Abstract
- The influence of Grashof and Reynolds number in Metal Organic Chemical Vapor (MOCVD) reactors is being investigated under a combined empirical/numerical study. As part of that research, the deposition of Indium Phosphide in an MOCVD reactor is modeled using the computational code CFD-ACE. The model includes the effects of convection, conduction, and radiation as well as multi-component diffusion and multi-step surface/gas phase chemistry. The results of the prediction are compared with experimental data for a commercial reactor and analyzed with respect to the model accuracy.
- Subjects :
- Fluid Mechanics And Heat Transfer
Subjects
Details
- Language :
- English
- Database :
- NASA Technical Reports
- Journal :
- NASA Microgravity Materials Science Conference
- Notes :
- NAS8-40846
- Publication Type :
- Report
- Accession number :
- edsnas.19990040308
- Document Type :
- Report