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Low-power piezoelectric micro-machined valve
- Publication Year :
- 2010
- Publisher :
- United States: NASA Center for Aerospace Information (CASI), 2010.
-
Abstract
- A piezoelectric microvalve employs a valve element formed of hermetically sealed and opposed plates flexed together by a cross axis piezoelectric element. Large flow modulation with small piezoelectric actuator displacement is obtained by perimeter augmentation of the valve seat which dramatically increases the change in valve flow area for small deflections.
- Subjects :
- Electronics And Electrical Engineering
Subjects
Details
- Language :
- English
- Database :
- NASA Technical Reports
- Notes :
- NNA05CP82G
- Publication Type :
- Report
- Accession number :
- edsnas.20100042310
- Document Type :
- Report