Measuring Large Amplitude Surface Figure Error using Coordinate Metrology

Advances in optical testing are as important as advances in optical fabrication, because one can make only what one can measure, particularly for unconventional prescriptions, like aspheric and freeform optics. A new, high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision, contact-probe-based coordinate measuring machines or laser tracker/radar metrology to accurately measure surfaces with large figure error. This nearly universal optical testing method employs an ultra-precision coordinate measuring machine equipped with a non-contact probe. It was developed to characterize a broad spectrum of optical surfaces including ones with high slopes, impossible to measure using traditional interferometric testing. Optical components, covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were reduced using custom-developed routines to determine the optic’s alignment, surface departure from design, and the as-built optical prescription. This information guided the fabrication and modeling of these optical components