Back to Search
Start Over
Silicon Nitride Surface Passivation
- Source :
- DTIC AND NTIS
- Publication Year :
- 1969
-
Abstract
- The monograph presents a review of the state of the art of silicon nitride usage by discussing: Problems with use of silicon dioxide (Background); The uses of silicon nitride in the planar process; Silicon nitride processing; Reliability experience with silicon nitride.
Details
- Database :
- OAIster
- Journal :
- DTIC AND NTIS
- Notes :
- text/html, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.ocn831725388
- Document Type :
- Electronic Resource