Microsystems Research in Japan

This report reviews Japan's research and development activities and strategies in the field of microsystems and microelectromechanical systems (MEMS). Topics covered include the future outlook of national initiatives, interactions between industry and universities, technology and manufacturing infrastructure, and emerging applications research. The panel's findings include the following: non-silicon microsystem technologies, together with parallel assembly technologies for low-cost mass manufacturing, merit increased attention. Incorporating non-silicon technologies into the MEMS Exchange should be considered, in order to identify, support, and standardize U.S. capabilities. Opportunities should be identified for exploiting early applications of synthetic nanostructures in microsystems. Metrology, process control, and device standardization should be pursued, in collaboration with Asia and Europe. Additional findings are outlined in the panel's executive summary.
Sponsored in part by the National Institute of Standards and Technology Grant no. NA1341-02-W-0916. The original document contains color images.