Initial Stages of Growth and Formation of CaF2 Nanostructures on Si (001)

Stimulated by a number of potential applications, growth of fluorite (CaF2) on Si 111 has been extensively studied. Only a few attempts have been undertaken, however, to investigate the initial stages of CaF2 growth on a technologically important Si OO1 surface, where anisotropic CaF2 growth accompanied by the formation of the quasi one-dimensional islands was observed using TEM and STM techniques. Such islands with nanometer scale width could be attractive for nanolithography. In this work we studied the initial stages of the fluorite growth and the formation of nanometer-scale islands on Si OO1 using electron diffraction (RHEED and LEED), atomic force microscopy (AFM), ultraviolet photoemission spectroscopy (UPS) and metastable atom deexcitation spectroscopy (MDS).
This article is from ADA408025 Nanostructures: Physics and Technology International Symposium (9th), St. Petersburg, Russia, June 18-22, 2001 Proceedings