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Uncooled Infrared Detector Arrays With Electrostatically Levitated Sensing Elements
- Source :
- DTIC AND NTIS
- Publication Year :
- 2005
-
Abstract
- The goals of this project were to develop the technologies necessary to implement a new, non-contacting infrared sensing element. As described in our proposal, the sensing element is to be suspended in tension with electrostatic forces within a pixel cavity. The creation of this structure has required the development of a number of MEMS fabrication techniques. We have also developed new circuit topologies to the novel sensing structure.<br />The original document contains color images.
Details
- Database :
- OAIster
- Journal :
- DTIC AND NTIS
- Notes :
- text/html, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.ocn834279954
- Document Type :
- Electronic Resource