The three-dimensional implantation distribution of 200 keV Hg+ ions in quartz

The three-dimensional distribution of 200 keV Hg+ ions implanted into quartz has been reconstructed by means of the "Modified Tomographic Reconstruction" technique from a set of depth profiles for different implantation angles. We assume that the geometrical shape of the 3D distribution can be described by a simple function with only few adjustable parameters. The choice of a split Gaussian can reduce dramatically the number of necessary input profiles to only 3 or 4. In the case of 200 keV Hg implanted into quartz, the experimental profiles are wider than the theoretical predictions. This points perhaps to some anisotropic radiation enhanced mobility after the implantation which is preferentially into forward direction.