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A Miniaturized Optical Sensor with Integrated Gas Cell
- Publication Year :
- 2015
-
Abstract
- The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization, while maintaining robustness without any moving parts. Multiple reflections from highly reflective mirrors allow a 24-25.5 ?m long resonator cavity to also act as a gas cell with an equivalent optical absorption path length of 6 mm.<br />Microelectronics<br />Electrical Engineering, Mathematics and Computer Science
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1008806329
- Document Type :
- Electronic Resource