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Novel Batch Titanium Nitride CVD Process for Advanced Metal Electrodes
- Authors :
- Zagwijn, P.M. (author)
Verweij, W. (author)
Pierreux, D. (author)
Noureddine, A. (author)
Bankras, R. (author)
Oosterlaken, E. (author)
Snijders, G.J. (author)
Van den Hout, M. (author)
Fischer, P. (author)
Wilhelm, R. (author)
Knapp, M. (author)
Zagwijn, P.M. (author)
Verweij, W. (author)
Pierreux, D. (author)
Noureddine, A. (author)
Bankras, R. (author)
Oosterlaken, E. (author)
Snijders, G.J. (author)
Van den Hout, M. (author)
Fischer, P. (author)
Wilhelm, R. (author)
Knapp, M. (author)
- Publication Year :
- 2008
-
Abstract
- Delft University of Technology
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1008823619
- Document Type :
- Electronic Resource