Tuning of photonic crystal cavities by controlled removal of locally infiltrated water

We present a spectral tuning mechanism of photonic crystal microcavities based on microfluidics. The microinfiltration with water of one or few cavity holes and its subsequent controlled evaporation allow us to tune the cavity resonances in a spectral range larger than 20 nm, with subnanometer accuracy, and we also observe that the addition of water in the microcavity region improves its quality factor Q. © 2009 American Institute of Physics.