Scaling of high-k dielectrics towards sub-Inm EOT

Authors :: Heyns, M
Beck, S
Bender, H
Blomme, P
Boullart, W
Brijs, B
Carter, R
Caymax, M
Clues, M
Conard, T
De Gendt, S
Degraeve, R
Delabie, A
Deweerdt, W
Groeseneken, G
Henson, K
Kauerauf, T
Kubicck, S
Lucci, L
Lujan, G
Mentens, J
Pantisano, L
Petry, J
Richard, O
Rohr, E
Schram, T
Vandervvorst, W
van Doome, P
van Eishocht, S
Wetslinder, Jörgen
Witters, T
Zhao, C
Carter, E
Chen, J
Cosnier, V
Green, M
Jang, S E
Kaushik, V
Kerber, A
Kluth, J
Lin, S
Tsai, W
Young, E
Manabe, Y
Shimamoto, Y
Bajolet, P
de Witte, H
Maes, J W
Date, L
Pique, D
Coenergrachts, B
Vertommen, J
Passefort, S
Heyns, M
Beck, S
Bender, H
Blomme, P
Boullart, W
Brijs, B
Carter, R
Caymax, M
Clues, M
Conard, T
De Gendt, S
Degraeve, R
Delabie, A
Deweerdt, W
Groeseneken, G
Henson, K
Kauerauf, T
Kubicck, S
Lucci, L
Lujan, G
Mentens, J
Pantisano, L
Petry, J
Richard, O
Rohr, E
Schram, T
Vandervvorst, W
van Doome, P
van Eishocht, S
Wetslinder, Jörgen
Witters, T
Zhao, C
Carter, E
Chen, J
Cosnier, V
Green, M
Jang, S E
Kaushik, V
Kerber, A
Kluth, J
Lin, S
Tsai, W
Young, E
Manabe, Y
Shimamoto, Y
Bajolet, P
de Witte, H
Maes, J W
Date, L
Pique, D
Coenergrachts, B
Vertommen, J
Passefort, S
Publication Year :: 2003

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