Highly-conformal sputtered through-silicon vias with sharp superconducting transition

MLA

Alfaro Barrantes, J. A.(author), et al. Highly-Conformal Sputtered through-Silicon Vias with Sharp Superconducting Transition. 2021. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1245661242&authtype=sso&custid=ns315887.

APA

Alfaro Barrantes, J. A. (author), Mastrangeli, M. (author), Thoen, D. (author), Visser, S. (author), Bueno Lopez, J. (author), Baselmans, J. J. A. (author), & Sarro, P. M. (author). (2021). Highly-conformal sputtered through-silicon vias with sharp superconducting transition.

Chicago

Alfaro Barrantes, J.A. (author), M. (author) Mastrangeli, David (author) Thoen, Sten (author) Visser, J. (author) Bueno Lopez, J.J.A. (author) Baselmans, and Pasqualina M (author) Sarro. 2021. “Highly-Conformal Sputtered through-Silicon Vias with Sharp Superconducting Transition.” http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1245661242&authtype=sso&custid=ns315887.