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Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer
- Source :
- Massahi , S , Vu , L M , Ferreira , D D M , Christensen , F E , Gellert , N , Henriksen , P L , Svendsen , S , Jegers , A S , Collon , M , Landgraf , B , Girou , D , Thete , A , Shortt , B , Ferreira , I & Bavdaz , M 2020 , ' Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer ' , Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray , 14/12/2020 - 18/12/2020 .
- Publication Year :
- 2020
-
Abstract
- The demand for X-ray optics increases and so do their performance requirements. Iridium (Ir) thin film coatings have proven to be very robust and exhibit excellent reflective properties within the X-ray regime. However, the residual stress in Ir thin films is high and studies show that thin film Ir coatings with a thickness of 10–30 nm exhibit residual compressive stress1 as illustrated in Figure 1.
Details
- Database :
- OAIster
- Journal :
- Massahi , S , Vu , L M , Ferreira , D D M , Christensen , F E , Gellert , N , Henriksen , P L , Svendsen , S , Jegers , A S , Collon , M , Landgraf , B , Girou , D , Thete , A , Shortt , B , Ferreira , I & Bavdaz , M 2020 , ' Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer ' , Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray , 14/12/2020 - 18/12/2020 .
- Notes :
- application/pdf, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1248605637
- Document Type :
- Electronic Resource