Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System

A micro-electro-mechanical-system (MEMS) based, temperature triggered, switch is developed as a cost-effective solution for smart cooling control of solid-state-lighting systems. The switch (1.0x0.4 mm2) is embedded in a silicon substrate and fabricated with a single-mask 3D micro-machining process. The device switches on at a designed temperature threshold (130 °C) with a contact resistance of < 2 ohm, and switches off when the temperature drops below that limit. In this way, automatic control of a cooling system is possible, without any need of additional electronic components. The research is a part of the Enlight project.
Delft Institute of Microsystems and Nanoelectronics
Electrical Engineering, Mathematics and Computer Science