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A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness
- Authors :
- Paalvast, S.L. (author)
Van Zeijl, H.W. (author)
Su, J. (author)
Sarro, P.M. (author)
Van Eijk, J. (author)
Paalvast, S.L. (author)
Van Zeijl, H.W. (author)
Su, J. (author)
Sarro, P.M. (author)
Van Eijk, J. (author)
- Publication Year :
- 2007
-
Abstract
- Mechanical, Maritime and Materials Engineering
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1357848462
- Document Type :
- Electronic Resource