Analytical Modeling of AC Resistance in Thick Coil Integrated Spiral Inductors

In this paper, an analytical model for calculating the ac resistance due to the proximity effect in thick coil integrated spiral inductors is proposed. Based on 2-D Maxwell's equations, the redistribution of magnetic field and current in the coils caused by the proximity effect is modeled, and the ac resistance of the inductor is extracted. The analytical model is compared with both numerical simulations and experimental results. The ac resistance calculated by the model is good (within 14.8% discrepancy) up to the frequency of the peak quality factor for thick coil integrated spiral inductors.