PLASMA-BASED ATOMIC SCALE ETCHING APPROACHES USING EITHER ION OR ELECTRON BEAM ACTIVATION

MLA

Lin, Kang-Yi. Plasma-Based Atomic Scale Etching Approaches Using Either Ion or Electron Beam Activation. 2022. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1380358009&authtype=sso&custid=ns315887.

APA

Lin, K.-Y. (2022). Plasma-Based Atomic Scale Etching Approaches Using Either Ion or Electron Beam Activation.

Chicago

Lin, Kang-Yi. 2022. “Plasma-Based Atomic Scale Etching Approaches Using Either Ion or Electron Beam Activation.” http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1380358009&authtype=sso&custid=ns315887.