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A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry
- Source :
- Solid State Electronics 45 (2001) 1049 - 1054
- Publication Year :
- 2001
-
Abstract
- This is a comprehensive study of the characteristics of an AuGeSi and CoNd liquid metal alloy ion sources [Focused ion beams from liquid metal ion sources, 1991]. Such characteristics include current-voltage curves and ion beam mass-spectra. A careful investigation has been undertaken where the temperature is one of the main variable experimental parameters. Theoretical models support the experimental results.
Details
- Database :
- OAIster
- Journal :
- Solid State Electronics 45 (2001) 1049 - 1054
- Notes :
- application/pdf, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1415615287
- Document Type :
- Electronic Resource