Hydrogen redistribution and void formation in hydrogen plasma treated Czochralski silicon

MLA

Ulyashin, A., et al. “Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon.” Solid State Phenomena Vols. 82 - 84 (2002) 315, 2002. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1415619294&authtype=sso&custid=ns315887.

APA

Ulyashin, A., Job, R., Fahrner, W. R., Grambole, D., & Herrmann, F. (2002). Hydrogen redistribution and void formation in hydrogen plasma treated Czochralski silicon. Solid State Phenomena Vols. 82 - 84 (2002) 315.

Chicago

Ulyashin, A., R. Job, W. R. Fahrner, D. Grambole, and F. Herrmann. 2002. “Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon.” Solid State Phenomena Vols. 82 - 84 (2002) 315. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1415619294&authtype=sso&custid=ns315887.