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Mechanical Properties of MEMS Materials

Authors :
Stanimirović, Zdravko
Publication Year :
2009
Publisher :
IntechOpen, 2009.

Abstract

Mechanical Properties of MEMS Materials

Subjects

Subjects :
Technology & Engineering / Electronics

Details

Language :
English
ISBN :
978-953-307-027-8
953-307-027-7
ISBNs :
9789533070278 and 9533070277
Database :
Open Research Library
Accession number :
edsors.4f40450f.c486.4342.bca1.2abac142601f
Document Type :
CHAPTER

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Authors Abstract Subjects Details