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- proceedings of spie11
- micromachines8
- 2011 6th ieee international conference on nano/micro engineered and molecular systems6
- international journal of applied ceramic technology6
- journal of science: advanced materials and devices6
- mems/moems technologies and applications iii6
- acs applied materials & interfaces4
- applied radiation and isotopes4
- journal of micromechanics and microengineering4