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- journal of applied physics7
- journal of vacuum science & technology: part b-microelectronics & nanometer structures6
- proceedings of spie5
- journal of vacuum science & technology b: microelectronics and nanometer structures4
- ieee transactions on magnetics3
- ieee transactions on semiconductor manufacturing3
- journal of applied polymer science2
- journal of vacuum science & technology b: microelectronics and nanometer structures processing, measurement, and phenomena2
- microelectronic engineering2