1. Dielectric function spectra of GaN, AlGaN, and GaN/AlGaN heterostructures.
- Author
-
Wagner, J., Obloh, H., Kunzer, M., Maier, M., Ko¨hler, K., and Johs, B.
- Subjects
- *
DIELECTRICS , *HETEROSTRUCTURES , *CHEMICAL vapor deposition - Abstract
The pseudodielectric function spectra <ε> of wurtzite GaN, AlGaN, and GaN/AlGaN heterostructures were determined for photon energies ranging from 2 to 5 eV, using variable angle spectroscopic ellipsometry (SE). Samples were grown by low-pressure metalorganic chemical vapor deposition on c-plane sapphire substrates. The experimental <ε> spectra were analyzed using a multilayer approach, describing the dielectric functions of the individual layers by a parametric oscillator model. In this way, parametric dielectric function spectra of GaN and Al[sub x]Ga[sub 1-x]N (x≤0.16) were derived, as well as the composition dependence of the Al[sub x]Ga[sub 1-x]N band gap energy. The SE band gap data were found to be consistent with a bowing parameter close to 1 eV. Finally, the GaN and Al[sub x]Ga[sub 1-x]N parametric dielectric functions were used to quantitatively analyze the pseudodielectric function spectrum of GaN/AlGaN modulation doped field effect transistor structures, demonstrating the potential of SE in combination with a multilayer parametric dielectric function model for nondestructive ex situ control of GaN/AlGaN device structures. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]
- Published
- 2001
- Full Text
- View/download PDF