1. Comparative analysis of the effects of tantalum doping and annealing on atomic layer deposited (Ta2O5)x(Al2O3)1-x as potential gate dielectrics for GaN/AlxGa1-xN/GaN high electron mobility transistors
- Author
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Partida-Manzanera, T., Roberts, J. W., Bhat, T. N., Zhang, Z., Tan, H. R., Dolmanan, S. B., Sedghi, N., Tripathy, S., and Potter, R. J.
- Subjects
TANTALUM compounds ,SEMICONDUCTOR doping ,DIELECTRICS ,ELECTRIC fields ,PHYSICS - Abstract
This paper describes a method to optimally combine wide band gap Al
2 O3 with high dielectric constant (high-κ) Ta2 O5 for gate dielectric applications. (Ta2 O5 )x (Al2 O3 )1-x thin films deposited by thermal atomic layer deposition (ALD) on GaN-capped Alx Ga1-x N/GaN high electron mobility transistor (HEMT) structures have been studied as a function of the Ta2 O5 molar fraction. X-ray photoelectron spectroscopy shows that the bandgap of the oxide films linearly decreases from 6.5 eV for pure Al2 O3 to 4.6 eV for pure Ta2 O5 . The dielectric constant calculated from capacitance-voltage measurements also increases linearly from 7.8 for Al2 O3 up to 25.6 for Ta2 O5 . The effect of post-deposition annealing in N2 at 600 °C on the interfacial properties of undoped Al2 O3 and Ta-doped (Ta2 O5 )0.12(Al2 O3 )0.88 films grown on GaN-HEMTs has been investigated. These conditions are analogous to the conditions used for source/drain contact formation in gate-first HEMT technology. A reduction of the Ga-O to Ga-N bond ratios at the oxide/HEMT interfaces is observed after annealing, which is attributed to a reduction of interstitial oxygen-related defects. As a result, the conduction band offsets (CBOs) of the Al2 O3 /GaN-HEMT and (Ta2 O5 )0.16(Al2 O3 )0.84 /GaN-HEMT samples increased by ~1.1 eV to 2.8 eV and 2.6 eV, respectively, which is advantageous for n-type HEMTs. The results demonstrate that ALD of Ta-doped Al2 O3 can be used to control the properties of the gate dielectric, allowing the κ-value to be increased, while still maintaining a sufficient CBO to the GaN-HEMT structure for low leakage currents. [ABSTRACT FROM AUTHOR]- Published
- 2016
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