Author: "Soderbarg, Anders" / Database: Complementary Index - Searchworks@Jio Institute Digital Library Search Results

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Author: Ljungberg, Karin and Soderbarg, Anders
Subjects: SURFACE preparation, SILICON, GEOMETRIC surfaces
Abstract: Presents a method for silicon surface preparation prior to wafer bonding by cleaning in sulphuric peroxide mixture (SPM). Effects of SPM modification on silicon surface; Substitution of fluorine by hydroxide groups as a result of water rinse; Measurement of higher contact wave velocities and bond strengths.
Published: 1995
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Author: Ljungberg, Karin, Soderbarg, Anders, and Backlund, Ylva
Subjects: SURFACES (Physics), SOLUTION (Chemistry)
Abstract: Investigates the bonding of hydrophobic silicon surfaces in aqueous and buffered hydrofluoric solutions. Observation of contact wave spontaneity and velocity; Determination of bond strengths by measuring the surface energy; Effect of water rinsing on surface bonding and spontaneity.
Published: 1993
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