Search

APL materials 7(9), 091105 (2019). doi:10.1063/1.5108654, Published by AIP Publ., Melville, NY

Faraday discussions 213, 197-213 (2019). doi:10.1039/C8FD00117K, Published by Royal Society of Chemistry, London, Cambridge [u.a.]

During DRAM capacitor scaling a lot of effort was spent searching for new material stacks to overcome the scaling limitations of the current material stack, such as leakage and sufficient capacitance. In this study, very promising results for a SrTiO3 based capacitor with a record low capacitance equivalent thickness value of 0.2 nm at target leakage current are presented. Due to the material properties of SrTiO3 films (high vacancy concentration and low band gap), which are leading to an increased leakage current, a physical thickness of at least 8 nm is required at target leakage specifications. However, this physical thickness would not fit into an 18 nm DRAM structure. Therefore, two different new approaches to develop a new ZrO2 based DRAM capacitor stack by changing the inter-layer material from Al2O3 to SrO, and the exchange of the top electrode material from TiN to Pt are presented. A combination of these two approaches leads to a capacitance equivalent thickness value of 0.47 nm. Most importantly, the physical thickness of < 5 nm for the dielectric stack is in accordance with the target specifications. Detailed evaluations of the leakage current characteristics lead to a capacitor model which allows the prediction of the electrical behavior with thickness scaling. ispartof: Journal of Applied Physics vol:119 issue:6 pages:064101-1 status: published

Using basic principles from complex analysis, we prove that complex potentials associated with locally sourceless, locally irrotational plane flows only have logarithmic singularities. Applications to flows around contours are given.

A socio-technical approach was used to study the qualitative effects of deploying a medication-CPOE (Computer-based Provider Order Entry System) at two internal medical wards on a hospital in Denmark. Our results show spatial and temporal transformations of core acts in medication work, transformation in competencies, and less time spent at the bedside for nurses and doctors, as a system - constructed for ubiquitous drug-order entries and handling - was implemented for local use. This study throws light on problems of patient continuity, patient-related and IT-system-related error-handling and time spend on core activities - when ubiquitous IT is used locally in a real physical setting with specific traditions of doing medication acts. The paper argues for the project organization to support the local renegotiation of time and place of programs of (work-)action and of collaboration with ‘ubiquitous’ CPOE-systems, as well as set up feed-back for maturation of software for future clinical use.