1. The growth processes of thin film silicides in Si/Ni planar systems
- Author
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G. Majni, M. Costato, and F. Panini
- Subjects
Thin layers ,Materials science ,Silicon ,Metallurgy ,Metals and Alloys ,Analytical chemistry ,chemistry.chemical_element ,Surfaces and Interfaces ,Substrate (electronics) ,Atmospheric temperature range ,Rutherford backscattering spectrometry ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Nickel ,chemistry ,Phase (matter) ,Materials Chemistry ,Thin film - Abstract
All the compounds predicted from the SiNi phase diagram were observed by depositing thin layers of nickel onto silicon in known quantities and ratios to each other using an unreactive substrate such as SiO2. After deposition, the samples were annealed in the temperature range 200–750°C and analysed using 2 MeV 4He+ Rutherford backscattering spectrometry and X-ray diffraction techniques. Ni2Si is the first phase formed at a low temperature (about 250°C). Under silicon-rich conditions the system develops in a reproducible manner, subsequently giving rise, when all the nickel has reacted, to the formation of NiSi and of NiSi2 by reaction at 750°C of the NiSi with silicon. The kinetic diffusion approach accounts for the formation and sequence of Ni2Si and NiSi. The phase Ni5Si2 forms between Ni2Si and nickel under nickel-rich conditions. The phases Ni3Si2 and Ni3Si were observed at 400°C and 450°C respectively.
- Published
- 1985
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