Author: "Yigwon Kim" / Database: OpenAIRE - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yigwon Kim"' showing total 2 results

Start Over Author "Yigwon Kim" Database OpenAIRE

2 results on '"Yigwon Kim"'

1. An investigation on the process control for the solid application of EUV MOR

Author: Sangjin Kim, Il-Hwan Kim, Hyungju Ryu, Yongbeom Seo, Yigwon Kim, Jinhee Jang, Tae-Min Choi, Sol Jeong, Yongchul Jeong, Kyoungyong Cho, Cheolin Jang, Kyeongbeom Park, and Changmin Park
Published: 2023
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2. Chemical approach to make the most of EUVL: stochastic effect mitigation with developer and rinse

Author: Hyungju Ryu, Dokyeong Kwon, Jiho Song, Wongi Park, Jinseong Gwak, Haram Ko, Jiyoung Lee, Jinpyoung Kim, Kyungseok Ryu, Sungjo Hwang, Taemin Jeong, Heeyoung Go, Yigwon Kim, Kyoungyong Cho, Sangjin Kim, and Changmin Park
Published: 2023
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