1. Band alignment and interfacial structure of ZnO/Si heterojunction with Al2O3 and HfO² as interlayers.
- Author
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Hong-Liang Lu, Ming Yang, Zhang-Yi Xie, Yang Geng, Yuan Zhang, Peng-Fei Wang, Qing-Qing Sun, Shi-Jin Ding, and Wei Zhang, David
- Subjects
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HETEROJUNCTIONS , *ENERGY bands , *ATOMIC layer deposition , *OPTOELECTRONIC devices , *ZINC oxide , *HAFNIUM oxide , *X-ray photoelectron spectroscopy - Abstract
Energy band alignment of ZnO/Si heterojunction with thin interlayers Al2O3 and HfO2 grown by atomic layer deposition has been studied using x-ray photoelectron spectroscopy. The valence band offsets of ZnO/Al2O3 and ZnO/HfO2 heterojunctions have been determined to be 0.43 and 0.22 eV, respectively. Accordingly, the band alignment ZnO/Si heterojunction is then modified to be 0.34 and 0.50 eV through inserting a thin Al2O3 and HfO2 layer, respectively. The feasibility to tune the band structure of ZnO/Si heterojunction by selecting a proper interlayer shows great advantage in improving the performance of the ZnO-based optoelectronic devices. [ABSTRACT FROM AUTHOR]
- Published
- 2014
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