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A local silicon-gate carbon nanotube field effect transistor (CNFET) configuration has been proposed and implemented for integration purpose. By combining the advantages of in situ carbon nanotube growth technology and the silicon-on-insulator technology, we have realized the CNFETs with individual device operation, low parasitic capacitance, high yield fabrication, and better compatibility to the complementary-metal-oxide-semiconductor (CMOS) process. The CNFETs show up-to-date electrical performance. The scaling effect of gate oxide is also explored. This configuration makes CNFET a step closer to the CMOS integrated circuit application. [ABSTRACT FROM AUTHOR]

Carbon nanotube (CNT) has a potential to be used as nanoscale transmission lines and as high-performance passive components in nanoelectronics. In this letter, we discuss single-walled carbon nanotubes (SWNTs) that were grown using a chemical-vapor deposition technique. Both the dc and ac two-terminal resistances were measured and analyzed. The transmission properties of the SWNTs were shown by comparing the S parameters of a device with CNTs with those of a device without a CNT. The radio-frequency characterization of the CNTs was carried out using the network analyzer to frequency of 20 GHz. [ABSTRACT FROM AUTHOR]

Silicon oxynitride rectangular optical waveguides have been fabricated by plasma-enhanced chemical vapor deposition and dry etching. The propagation loss and polarization dependent loss in as-grown samples show a substantial reduction after the samples have been annealed. Birefringence measurements before and after annealing on waveguides of different widths suggest that the waveguide modal birefringence is strongly affected by both waveguide geometry and stress in the material. Hence, the modal birefringence can be minimized by designing the appropriate waveguide geometry to compensate for any stress effects. [ABSTRACT FROM AUTHOR]