1. Effects of Al content on properties of Al–N codoped ZnO films
- Author
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Zeng, Yu-Jia, Ye, Zhi-Zhen, Lu, Jian-Guo, Zhu, Li-Ping, Li, Dan-Ying, Zhao, Bing-Hui, and Huang, Jing-Yun
- Subjects
- *
ALUMINUM , *MOLECULAR orbitals , *SPECTRUM analysis , *ZINC oxide - Abstract
Abstract: N doped and Al–N codoped ZnO films were prepared by dc reactive magnetron sputtering with a series of metal–Zn targets having different Al contents. The best p-type electrical properties of codoped ZnO, such as carrier concentration of 2.52×1017 cm−3, resistivity of 28.3Ωcm can be realized by using 0.4at.% Al target. Results of Hall effect and X-ray photoelectron spectroscopy (XPS) measurements confirm that the presence of Al indeed facilitates the incorporation of N through formation Aln codoped ZnO. Finally, a new judgement for codoping effect in ZnO is proposed tentatively: the best codoping effect can be realized when the codoped ZnO films possess a closest (002) d-spacing value to the nominally undoped ZnO. [Copyright &y& Elsevier]
- Published
- 2005
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