1. Densification of polycrystalline alumina with dense dislocation arrays via stainless steel sealed powder metallurgy hot isostatic press.
- Author
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Han, HyukSu, Ko, Tae-Wan, Kim, Mintae, Kwon, Ohyung, Kim, DaeHa, Choi, Heechae, Lim, Sung-Hwan, Kim, Hyung Giun, and Lee, Taeg Woo
- Subjects
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POWDER metallurgy , *ISOSTATIC pressing , *HOT pressing , *ALUMINUM oxide , *STAINLESS steel , *CERAMICS - Abstract
Aluminum oxide (alumina, Al 2 O 3) is one of the most widely used ceramic materials owing to its excellent dielectric, chemical resistance, and low cost. In contemporary semiconductor fabrication processing, in particular, Al 2 O 3 plays a key role in high-value processing components, such as an electrostatic chuck. Here, we report for the first time a novel densifying technique for Al 2 O 3 that can be referred to as the powder metallurgy hot isostatic press (PM-HIP) process. Unlike the conventional HIP process, our PM-HIP process can directly convert Al 2 O 3 powders into fully densified ceramics via a one-step process. More importantly, during the PM-HIP process, thermomechanical energy can easily be transferred to each of the particles simultaneously, which facilitates the sinter process (i.e., necking and diffusion) and the clipping of lattice planes. As a result, highly dense dislocation arrays are embedded within the entire volume of the sintered body. This correlates with unique material properties-processing relationships in the Al 2 O 3 ceramics sintered via PM-HIP. The Al 2 O 3 ceramics sintered by PM-HIP exhibited unique mechanical and electrical properties, highlighting its potential for use in electrostatic chucks. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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