1. A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions.
- Author
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Ding Wu, Liu Yan, Zhang Yun, Guo Jian, Zuo Yu, Cheng Bu, Yu Jin, Zhong and, and Wang Qi
- Subjects
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SILICON oxide , *NITRIDES , *COMPARATIVE studies , *MATRICES (Mathematics) , *PHOTOLUMINESCENCE , *EUROPIUM , *METAL ion spectra , *CHEMICAL vapor deposition - Abstract
This paper compares the properties of silicon oxide and nitride as host matrices for Er ions. Erbium-doped silicon nitride films were deposited by a plasma-enhanced chemical-vapour deposition system. After deposition, the films were implanted with Er3+ at different doses. Er-doped thermal grown silicon oxide films were prepared at the same time as references. Photoluminescence features of Er3+ were inspected systematically. It is found that silicon nitride films are suitable for high concentration doping and the thermal quenching effect is not severe. However, a very high annealing temperature up to 1200 degC is needed to optically activate Er3+, which may be the main obstacle to impede the application of Er-doped silicon nitride. [ABSTRACT FROM AUTHOR]
- Published
- 2009
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