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1. FBAR Sensor Array for in Liquid Operation

Author

Johannes Enlund, Ilia Katardjiev, Ventsislav Yantchev, and David Martin

Subjects
Physics::Fluid Dynamics, Condensed Matter::Soft Condensed Matter, Crosstalk, Resonator, Materials science, Sensor array, Acoustics, Electrode, Electrical and Electronic Engineering, Thickness shear, Instrumentation, Electrical impedance
Abstract

This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.

Published
2010
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