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A dual-gate superjunction insulated gate bipolar transistor (IGBT) (DG-SJ-IGBT) is proposed and studied with numerical TCAD simulations. The new structure utilizes the superjunction structure as a controlling port for the strength of conductivity modulation inside the IGBT, so that a low VON is obtained by a strong conductivity modulation during ON-state and a near-unipolar turn-off is achieved by removing the minority carriers before the turn-off event. For this purpose, the p-pillar in the DG-SJ-IGBT is connected to the p-body using a built-in p-channel MOSFET. The primary gate and the auxiliary gate (i.e., gate of p-MOSFET) are controlled by two separate driving signals. In the IGBT’s ON-state, the p-MOSFET disconnects the p-pillar, enabling full conductivity-modulated bipolar conduction and a consequent low VON. As a well-known issue, conductivity modulation is accompanied by significant additional turn-off loss (EOFF). To overcome this issue, the DG-SJ-IGBT takes advantage of the p-pillar which extends through the entire drift region. Before the IGBT’s turn-off event, the p-MOSFET electrically grounds the p-pillar to the p-body. The grounded p-pillar serves as a hole extractor, suppresses the minority carrier density throughout the depth of the drift region, and brings the device into a near-unipolar conduction mode. Thus, a near-unipolar turn-off can be obtained, resulting in a low EOFF. [ABSTRACT FROM AUTHOR]

A p-type shield region (p-shield) under the gate trench is typically adopted in a SiC trench MOSFET for achieving a lower oxide field and reverse transfer capacitance ( Crss) . This paper comparatively studies the effects of a grounded p-shield and a floating p-shield. Device simulations using Sentaurus TCAD are carried out in this paper to reveal the devices’ internal dynamics. The floating p-shield can effectively reduce the OFF-state oxide field as a grounded p-shield does, without degrading its static performance. However, after being switched from the OFF-state, the ON-state oxide field in the trench MOSFET with a floating p-shield (FS-MOS) is dramatically elevated. Compared with the trench MOSFET with a grounded p-shield, the FS-MOS also exhibits a higher C{{\text {rss}}} and a consequently slower switching speed. Furthermore, the FS-MOS exhibits a degradation of dynamic R{ \mathrm{ON}} during switching operation. A charge storage mechanism is then presented to explain the dynamics in FS-MOS. Upon a high V{{\text {DS}}} , holes are emitted from the floating p-shield when the parasitic p-n-p structure consisting of p-shield, p-body, and n-region between them is punched through, leaving negative charges in the floating p-shield even when the high V{{\text {DS}}} is removed. Based on this mechanism, the behaviors of the FS-MOS are well explained. [ABSTRACT FROM AUTHOR]

In this paper, we present a comprehensive reviewand discussion of the state-of-the-art device technology and application development of GaN-on-Si power electronics. Several device technologies for realizing normally off operation that is highly desirable for power switching applications are presented. In addition, the examples of circuit applications that can greatly benefit from the superior performance of GaN power devices are demonstrated. Comparisonwith other competingpower device technology, such as Si superjunction-MOSFET and SiC MOSFET, is also presented and analyzed. Critical issues for commercialization of GaN-on-Si power devices are discussed with regard to cost, reliability, and ease of use. [ABSTRACT FROM AUTHOR]

A GaN/SiC hybrid field-effect transistor (HyFET) is proposed as a high-voltage power device that provides a high-mobility lateral AlGaN/GaN channel to reduce the channel resistance and a vertical SiC drift region to sustain the high OFF-state voltage. The performance of the HyFET is evaluated by numerical device simulations. Compared with the conventional SiC MOSFET, the HyFET exhibits a greatly reduced R\mathrm{\scriptscriptstyle ON} together with a low C\mathrm{ GD} and low gate charges. The figures of merit Q\mathrm{ G}\times R\mathrm{\scriptscriptstyle ON} and Q\mathrm{ GD}\times R\mathrm{\scriptscriptstyle ON} of the HyFET are dramatically improved. [ABSTRACT FROM AUTHOR]

In this paper, we report the device performance of a high-voltage normally off Al2O3/GaN MOSFET on the Si substrate. Normally off operation is obtained by multiple cycles of O2 plasma oxidation and wet oxide-removal gate recess process. The recessed normally off GaN MOSFET with 3 \mum gate-drain distance exhibits a maximum drain current of 585 mA/mm at 9 V gate bias. The threshold voltage of the MOSFET is 2.8 V with a standard derivation of 0.2 V on the sample with an area of 2 \,\times\, 2 {\rm cm}^{2} . The gate leakage current is below 10^{-6}~{\rm mA}/{\rm mm} during the whole gate swing up to 9 V and the I{\scriptstyleON}/I{\scriptstyle OFF} ratio is larger than 10^{9} , indicating the good quality of Al2O3 gate insulator. The MOSFET with 10 \mum gate-drain distance shows a three terminal OFF-state breakdown voltage (BV) of 967 V at zero gate-source bias with a drain leakage current criterion of 1 \muA/mm . The specific ON-resistance $(R_{{{\scriptstyle {\rm ON}}},{\rm SP}}) of the device is 1.6 m\Omega\,\cdot\,cm^2 and the power figure of merit (BV^2/R{{\scriptstyle ON},SP}) is 584 MW/cm^2 . [ABSTRACT FROM AUTHOR]