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Start Over Author "Yan, Jin-Hai" Journal ieee transactions on electron devices
1 results on '"Yan, Jin-Hai"'

1. Improvement of RCA transistor using RTA annealing after the formation of interfacial oxide

Author

Chun, Zhang L., Yan, Jin Hai, Fei, Ye Hong, Zhi, Gao Yu, and Jun, Ning Bao; Xian, Mo Bang

Subjects
Bipolar transistors -- Electric properties, Circuit design -- Testing, Annealing -- Measurement, Circuit designer, Integrated circuit design, Business, Electronics, Electronics and electrical industries
Abstract

A RCA transistor with double-polysilicon structure is developed, in which an ultra-thin interfacial oxide layer is deliberately produced between polysilicon and silicon emitter. Good stability of the ultra-thin oxide is obtained by using rapid thermal annealing (RTA) method after the formation of RCA oxide.

Published
2002

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