Author: "Ashwanth Subramanian" / Journal: international conference on extreme ultraviolet lithography 2022 - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Ashwanth Subramanian"' showing total 3 results

Start Over Author "Ashwanth Subramanian" Journal international conference on extreme ultraviolet lithography 2022

3 results on '"Ashwanth Subramanian"'

1. Chemical reactions induced by low-energy electron exposure on a novel inorganic-organic hybrid dry EUV photoresist deposited by molecular atomic layer deposition (MALD)

Author: Dan N. Le, Su Min Hwang, Jihoon Woo, Seungsoo Choi, Taehee Park, Jean-Francois Veyan, Nikhil M. Tiwale, Ashwanth Subramanian, Won-Il Lee, Chang-Yong Nam, Rino Choi, and Jiyoung Kim
Published: 2022
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2. EUVL characteristics of indium-oxide-infiltrated PMMA hybrid photoresist synthesized by vapor-phase infiltration

Author: Ashwanth Subramanian, Nikhil M. Tiwale, Won-Il Lee, Kim Kisslinger, Ming Lu, Aaron Stein, Jiyoung Kim, and Chang-Yong Nam
Published: 2022
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3. Low-energy electron exposure and reactive ion etching characteristics of hybrid EUV photoresist synthesized by molecular atomic layer deposition

Author: Won-Il Lee, Ashwanth Subramanian, Nikhil M. Tiwale, Dan N. Le, Su Min Hwang, Jiyoung Kim, and Chang-Yong Nam
Published: 2022
Full Text: View/download PDF

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