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Your search keyword '"Kumar, Ajay"' showing total 2 results
Start Over Author "Kumar, Ajay" Journal journal of applied physics Publisher american institute of physics, inc.
2 results on '"Kumar, Ajay"'

1. High aspect ratio silicon etch: a review

Author

Banqiu Wu, Kumar, Ajay, and Pamarthy, Sharma

Subjects
Chemical etching -- Analysis, Integrated circuits -- Design and construction, Semiconductor chips -- Design and construction, Microelectromechanical systems -- Usage, Silicon -- Electric properties, Silicon -- Mechanical properties, Standard IC, Physics
Abstract

The different technological methods, critical challenges and main theories of the technologies of the high aspect ratio (HAR) silicon etch are analyzed. HAR silicon etch is an application associated with microelectromechanical systems and the application for three-dimensional integrated circuit required HAR etch with high and stable throughput, controllable profile and surface properties.

Published
2010

2. Single phase formation of Co-implanted ZnO thin films by swift heavy ion irradiation: Optical studies

Author

Kumar, Ravi, Singh, Fouran, Angadi, Basavaraj, Ji-Won Choi, Won-Kook Choi, Kwangho Jeong, Jong-Han Song, Khan, M. Wasi, Srivastava, J.P., Kumar, Ajay, and Tandon, R.P.

Subjects
Zinc oxide -- Atomic properties, Zinc oxide -- Optical properties, Dielectric films -- Atomic properties, Dielectric films -- Optical properties, Thin films -- Atomic properties, Thin films -- Optical properties, Ion bombardment -- Analysis, Physics
Abstract

The electronic structure of the Co substituted ZnO thin films are studied by using low temperature photoluminescence (PL) measurements and ultraviolet (UV)-visible absorption spectroscopy. The Co-doped ZnO films have shown three sharp levels and two shoulder levels of crystal field splitted Co d orbitals, respectively.

Published
2006

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