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1. Evaluation of insulating property by secondary ion mass spectrometry.

Author

Inoue, K. and Isogai, A.

Subjects
*SPECTRUM analysis, *INSULATING materials, *ELECTRONIC circuits
Abstract

Presents a study that measured the time dependence of the secondary ion intensity in secondary ion mass spectroscopy analysis of insulating films. Schematic diagram of the process on the reduction of surface charging and its equivalent circuits; Relation between the ion intensity suppression ratio and the film thickness.

Published
1987
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