1. Secondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamonds
- Author
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Bo-Rong Lin, Chun-Hsiang Chang, Srinivasu Kunuku, Chien-Hsu Chen, Hung-Kai Yu, Tung-Yuan Hsiao, Li-Chuan Liao, Fang-Hsin Chen, C. P. Lee, Chiung-Chi Wang, Yu-Jen Chang, Tzung-Yuang Chen, and Huan Niu
- Subjects
010302 applied physics ,Range (particle radiation) ,Materials science ,General Physics and Astronomy ,Nanoparticle ,Nanotechnology ,02 engineering and technology ,engineering.material ,equipment and supplies ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ion ,Secondary ion mass spectrometry ,Ion implantation ,Coating ,0103 physical sciences ,engineering ,Surface modification ,Wafer ,0210 nano-technology ,human activities - Abstract
Ion implantation is used to create nanodiamonds (NDs) with embedded magnetic ions for use in a wide range of biological and medical applications; however, the effectiveness of this process depends heavily on separating magnetic NDs from nonmagnetic ones. In this study, we use secondary ion mass spectrometry to verify the implantation of magnetic ions in NDs and the success of separation. When applied to a series of NDs with embedded iron or manganese ions, the sorting tool used in this study proved highly effective in selecting magnetic NDs. Besides, multienergy ion implantation and precise thickness control of NDs coating on the silicon wafer were suggested to improve this technology.
- Published
- 2019